ENTRY S0070 20130716 S018S007000000001 SUBENT S0070001 20130716 S018S007000100001 BIB 9 19 S007000100002 TITLE Measurement of N in high Z substrate using S007000100003 non-Rutherford backscattering S007000100004 AUTHOR (Ding Furong, Du Shekui, Dong Weizhong) S007000100005 INSTITUTE (3CPRBJG) S007000100006 REFERENCE (J,CPL,9,176,1992) S007000100007 FACILITY (VDG,3CPRBJG) 4.5 MV Van de Graaff accelerator S007000100008 The relative cross sections of the Non-RBS of He from S007000100009 N for 170 and 135 degrees(Lab.) in the energy range of S007000100010 2-5 MeV were measured simultaneously. S007000100011 SAMPLE The specimen was prepared in a UHV evaporator. A layer S007000100012 of TiN thin film with the thickness of 35 nm was S007000100013 deposited onto a polished carbon substrate. A thick S007000100014 layer of the compound of W, Ti and N was deposited. S007000100015 DETECTOR (SIBAR) The resolution of the semicoductor detector S007000100016 Si(Au) is 18 keV. S007000100017 ERR-ANALYS The maximum measurement error of less than 10% are S007000100018 estimated. S007000100019 HISTORY (20130716C) Compiled by Zhuang Youxiang and S007000100020 Chen Guochang (CNDC). S007000100021 ENDBIB 19 0 S007000100022 COMMON 1 3 S007000100023 EN-ERR S007000100024 KEV S007000100025 3. S007000100026 ENDCOMMON 3 0 S007000100027 ENDSUBENT 26 0 S007000199999 SUBENT S0070002 20130716 S018S007000200001 BIB 4 6 S007000200002 REACTION (7-N-0(A,EL)7-N-0,,DA,,RTH) S007000200003 MONITOR (22-TI-0(A,EL)22-TI-0,,DA) S007000200004 ANALYSIS Alpha scattering on Ti was assumed as Rutherford S007000200005 scattering. S007000200006 STATUS (CURVE) Fig.2 and Fig.3 of J,CPL,9,176,1992 was S007000200007 digitized by DGgraph-5.0. S007000200008 ENDBIB 6 0 S007000200009 NOCOMMON 0 0 S007000200010 DATA 3 179 S007000200011 ANG EN DATA S007000200012 ADEG KEV NO-DIM S007000200013 135. 2.02E+03 9.59E-01 S007000200014 135. 2.25E+03 7.61E-01 S007000200015 135. 2.49E+03 8.03E-01 S007000200016 135. 2.74E+03 7.30E-01 S007000200017 135. 2.97E+03 3.36E-01 S007000200018 135. 3.21E+03 1.48E+00 S007000200019 135. 3.43E+03 1.69E+00 S007000200020 135. 3.45E+03 9.96E-01 S007000200021 135. 3.47E+03 8.89E-01 S007000200022 135. 3.49E+03 9.52E-01 S007000200023 135. 3.52E+03 1.21E+00 S007000200024 135. 3.54E+03 1.16E+00 S007000200025 135. 3.55E+03 1.09E+00 S007000200026 135. 3.55E+03 1.34E+00 S007000200027 135. 3.57E+03 9.38E-01 S007000200028 135. 3.59E+03 1.18E+00 S007000200029 135. 3.59E+03 1.27E+00 S007000200030 135. 3.61E+03 1.23E+00 S007000200031 135. 3.62E+03 1.64E+00 S007000200032 135. 3.63E+03 1.78E+00 S007000200033 135. 3.65E+03 2.12E+00 S007000200034 135. 3.65E+03 2.42E+00 S007000200035 135. 3.66E+03 2.20E+00 S007000200036 135. 3.67E+03 2.55E+00 S007000200037 135. 3.69E+03 2.62E+00 S007000200038 135. 3.70E+03 2.45E+00 S007000200039 135. 3.70E+03 2.02E+00 S007000200040 135. 3.72E+03 1.18E+00 S007000200041 135. 3.72E+03 1.66E+00 S007000200042 135. 3.73E+03 1.46E+00 S007000200043 135. 3.74E+03 1.35E+00 S007000200044 135. 3.75E+03 1.14E+00 S007000200045 135. 3.77E+03 1.09E+00 S007000200046 135. 3.82E+03 1.09E+00 S007000200047 135. 3.84E+03 9.78E-01 S007000200048 135. 3.85E+03 9.08E-01 S007000200049 135. 3.87E+03 1.09E+00 S007000200050 135. 3.91E+03 1.19E+00 S007000200051 135. 3.93E+03 1.13E+00 S007000200052 135. 3.94E+03 1.48E+00 S007000200053 135. 3.96E+03 9.44E-01 S007000200054 135. 3.96E+03 1.18E+00 S007000200055 135. 3.96E+03 1.27E+00 S007000200056 135. 3.98E+03 1.89E+00 S007000200057 135. 3.99E+03 1.49E+00 S007000200058 135. 4.00E+03 1.32E+00 S007000200059 135. 4.02E+03 9.99E-01 S007000200060 135. 4.03E+03 5.82E-01 S007000200061 135. 4.04E+03 4.83E-01 S007000200062 135. 4.09E+03 6.69E-01 S007000200063 135. 4.14E+03 6.06E-01 S007000200064 135. 4.16E+03 5.15E-01 S007000200065 135. 4.19E+03 4.81E-01 S007000200066 135. 4.23E+03 7.09E-01 S007000200067 135. 4.28E+03 5.15E-01 S007000200068 135. 4.32E+03 7.15E-01 S007000200069 135. 4.35E+03 8.45E-01 S007000200070 135. 4.37E+03 6.58E-01 S007000200071 135. 4.39E+03 5.80E-01 S007000200072 135. 4.40E+03 7.55E-01 S007000200073 135. 4.41E+03 8.58E-01 S007000200074 135. 4.42E+03 1.14E+00 S007000200075 135. 4.43E+03 1.51E+00 S007000200076 135. 4.43E+03 1.69E+00 S007000200077 135. 4.45E+03 2.07E+00 S007000200078 135. 4.45E+03 1.75E+00 S007000200079 135. 4.45E+03 1.10E+00 S007000200080 135. 4.46E+03 1.63E+00 S007000200081 135. 4.47E+03 4.73E-01 S007000200082 135. 4.48E+03 2.90E-01 S007000200083 135. 4.54E+03 7.19E-01 S007000200084 135. 4.56E+03 1.16E+00 S007000200085 135. 4.59E+03 1.73E+00 S007000200086 135. 4.62E+03 1.70E+00 S007000200087 135. 4.68E+03 1.66E+00 S007000200088 135. 4.71E+03 1.21E+00 S007000200089 135. 4.75E+03 1.01E+00 S007000200090 135. 4.78E+03 1.10E+00 S007000200091 135. 4.80E+03 8.24E-01 S007000200092 135. 4.83E+03 8.49E-01 S007000200093 135. 4.87E+03 1.15E+00 S007000200094 135. 4.89E+03 1.29E+00 S007000200095 135. 4.90E+03 1.95E+00 S007000200096 135. 4.92E+03 2.27E+00 S007000200097 135. 4.93E+03 2.83E+00 S007000200098 135. 4.94E+03 2.96E+00 S007000200099 135. 4.95E+03 2.79E+00 S007000200100 135. 4.97E+03 2.66E+00 S007000200101 135. 4.97E+03 2.56E+00 S007000200102 135. 4.97E+03 2.47E+00 S007000200103 135. 4.98E+03 1.99E+00 S007000200104 135. 4.99E+03 1.89E+00 S007000200105 135. 5.01E+03 1.63E+00 S007000200106 135. 5.03E+03 1.84E+00 S007000200107 170. 2.03E+03 9.38E-01 S007000200108 170. 2.26E+03 9.38E-01 S007000200109 170. 2.49E+03 8.33E-01 S007000200110 170. 2.74E+03 5.10E-01 S007000200111 170. 2.97E+03 2.81E-01 S007000200112 170. 3.43E+03 2.30E+00 S007000200113 170. 3.45E+03 2.18E+00 S007000200114 170. 3.53E+03 2.28E+00 S007000200115 170. 3.55E+03 2.75E+00 S007000200116 170. 3.56E+03 3.30E+00 S007000200117 170. 3.56E+03 3.76E+00 S007000200118 170. 3.57E+03 2.10E+00 S007000200119 170. 3.58E+03 2.40E+00 S007000200120 170. 3.62E+03 2.85E+00 S007000200121 170. 3.64E+03 3.90E+00 S007000200122 170. 3.65E+03 4.81E+00 S007000200123 170. 3.65E+03 5.27E+00 S007000200124 170. 3.66E+03 8.10E+00 S007000200125 170. 3.66E+03 6.83E+00 S007000200126 170. 3.69E+03 6.15E+00 S007000200127 170. 3.69E+03 7.97E+00 S007000200128 170. 3.71E+03 5.36E+00 S007000200129 170. 3.72E+03 4.01E+00 S007000200130 170. 3.72E+03 2.56E+00 S007000200131 170. 3.74E+03 1.96E+00 S007000200132 170. 3.75E+03 1.63E+00 S007000200133 170. 3.78E+03 1.84E+00 S007000200134 170. 3.82E+03 2.40E+00 S007000200135 170. 3.84E+03 1.64E+00 S007000200136 170. 3.87E+03 2.53E+00 S007000200137 170. 3.91E+03 3.54E+00 S007000200138 170. 3.93E+03 4.25E+00 S007000200139 170. 3.94E+03 5.05E+00 S007000200140 170. 3.95E+03 6.06E+00 S007000200141 170. 3.95E+03 6.51E+00 S007000200142 170. 3.98E+03 7.28E+00 S007000200143 170. 4.01E+03 6.64E+00 S007000200144 170. 4.02E+03 5.41E+00 S007000200145 170. 4.03E+03 2.88E+00 S007000200146 170. 4.03E+03 4.03E+00 S007000200147 170. 4.06E+03 2.53E+00 S007000200148 170. 4.07E+03 1.75E+00 S007000200149 170. 4.09E+03 1.50E+00 S007000200150 170. 4.14E+03 1.51E+00 S007000200151 170. 4.16E+03 1.19E+00 S007000200152 170. 4.19E+03 6.46E-01 S007000200153 170. 4.23E+03 3.13E-01 S007000200154 170. 4.28E+03 3.13E-01 S007000200155 170. 4.32E+03 9.79E-01 S007000200156 170. 4.35E+03 1.53E+00 S007000200157 170. 4.37E+03 1.34E+00 S007000200158 170. 4.39E+03 1.52E+00 S007000200159 170. 4.41E+03 2.32E+00 S007000200160 170. 4.41E+03 3.10E+00 S007000200161 170. 4.42E+03 6.00E+00 S007000200162 170. 4.42E+03 4.04E+00 S007000200163 170. 4.44E+03 6.53E+00 S007000200164 170. 4.45E+03 6.19E+00 S007000200165 170. 4.45E+03 3.33E+00 S007000200166 170. 4.46E+03 5.04E+00 S007000200167 170. 4.47E+03 1.64E+00 S007000200168 170. 4.48E+03 9.69E-01 S007000200169 170. 4.54E+03 9.69E-01 S007000200170 170. 4.56E+03 7.50E-01 S007000200171 170. 4.59E+03 2.06E+00 S007000200172 170. 4.62E+03 2.32E+00 S007000200173 170. 4.65E+03 2.53E+00 S007000200174 170. 4.68E+03 2.14E+00 S007000200175 170. 4.71E+03 1.97E+00 S007000200176 170. 4.75E+03 2.08E+00 S007000200177 170. 4.77E+03 1.75E+00 S007000200178 170. 4.80E+03 2.06E+00 S007000200179 170. 4.83E+03 2.17E+00 S007000200180 170. 4.87E+03 4.02E+00 S007000200181 170. 4.90E+03 6.27E+00 S007000200182 170. 4.90E+03 4.36E+00 S007000200183 170. 4.91E+03 8.57E+00 S007000200184 170. 4.91E+03 1.24E+01 S007000200185 170. 4.93E+03 1.32E+01 S007000200186 170. 4.95E+03 1.26E+01 S007000200187 170. 4.95E+03 1.21E+01 S007000200188 170. 4.96E+03 1.06E+01 S007000200189 170. 4.97E+03 9.51E+00 S007000200190 170. 5.00E+03 8.91E+00 S007000200191 170. 5.01E+03 7.90E+00 S007000200192 ENDDATA 181 0 S007000200193 ENDSUBENT 192 0 S007000299999 SUBENT S0070003 20130716 S018S007000300001 BIB 4 9 S007000300002 REACTION 1(7-N-0(A,EL),,WID) S007000300003 2(7-N-0(A,EL),,WID) S007000300004 ANALYSIS 1Alpha scattering on Ti was assumed as Rutherford S007000300005 scattering. S007000300006 2Alpha scattering on N at 2023 keV was assumed as S007000300007 Rutherford scattering. S007000300008 MISC-COL (MISC) The cross section ratio between non- S007000300009 Rutherford scattering and Rutherford scattering. S007000300010 STATUS (TABLE) Table 1 of Chin. Phys. Lett.,9(1992),176. S007000300011 ENDBIB 9 0 S007000300012 COMMON 1 3 S007000300013 EN-RES-ERR S007000300014 KEV S007000300015 3. S007000300016 ENDCOMMON 3 0 S007000300017 DATA 9 6 S007000300018 EN-RES DATA 1DATA-MIN 1DATA-APRX 1DATA 2DATA-MIN 2S007000300019 DATA-APRX 2MISC 1MISC 2 S007000300020 KEV KEV KEV KEV KEV KEV S007000300021 KEV NO-DIM NO-DIM S007000300022 4946. 84. 68.S007000300023 12.7 11.8 S007000300024 4448. 36. 37. S007000300025 6.6 6.1 S007000300026 4010. 55. 65. S007000300027 7.5 6.8 S007000300028 3968. 60. 75. S007000300029 6.4 6.1 S007000300030 3695. 65. 70. S007000300031 8.0 7.8 S007000300032 3573. 10. S007000300033 10. 3.7 3.6 S007000300034 ENDDATA 16 0 S007000300035 ENDSUBENT 34 0 S007000399999 ENDENTRY 3 0 S007099999999