ENTRY O0890 20030424 0000O089000000001 SUBENT O0890001 20030424 0000O089000100001 BIB 12 31 O089000100002 TITLE C-12(A,A)C-12 resonant elastic scattering at 5.7 MeV O089000100003 as a tool for carbon quantification in silicon-based O089000100004 heterostructures. O089000100005 AUTHOR (M.Berti, D.De Salvador, A.V.Drigo, F.Romanato, O089000100006 A.Sambo, S.Zerlauth, J.Stangl, F.Schaffler, G.Bauer) O089000100007 INSTITUTE (2ITYPAD) O089000100008 (2AUSKUL) Institute of semiconductor physics O089000100009 REFERENCE (J,NIM/B,143,357,1998) O089000100010 HISTORY (20010704C) O089000100011 (20030424U) Last checking has been done. O089000100012 SAMPLE A self-supporting C-foil of nominal thickness 15 mug/ O089000100013 cm**2 was first produced. On the two surfaces of the O089000100014 foil Au and Ag films were evaporated, nominally 50 and O089000100015 100-nm thick respectively. The front Ag film is used aO089000100016 a spacer to separate the surface C contamination from O089000100017 the signal of the C foil and as a Rutherford reference O089000100018 element. The back Au film is used to prevent systematicO089000100019 errors from the increasing C deposition during the O089000100020 measurements and a second rutherford reference element.O089000100021 ADD-RES Spectra of different Si-C and Si-Ge-C samples. O089000100022 Carbon and silicon channeling dips across [111] axis. O089000100023 DETECTOR (SIBAR) The detector diaphragms defined a area to O089000100024 achive optimum energy resolution and detector O089000100025 efficiency. O089000100026 FACILITY (VDGT,2ITYPAD) 7-MV CN Van de Graaff accelerator. O089000100027 REL-REF (N,C0748002,J.A.LEAVITT+,J,NIM/B,40,776,1989) O089000100028 (N,O0879002,Y.FENG+,J,NIM/B,86,225,1994) O089000100029 Another measurments of elastic scattering. O089000100030 METHOD (BCINT) O089000100031 (SITA) See sample O089000100032 STATUS (TABLE) In the paper O089000100033 ENDBIB 31 0 O089000100034 NOCOMMON 0 0 O089000100035 ENDSUBENT 34 0 O089000199999 SUBENT O0890002 20030424 0000O089000200001 BIB 2 6 O089000200002 REACTION (6-C-12(A,EL)6-C-12,,DA,,RTH) O089000200003 ERR-ANALYS (ERR-T).The uncertainty is shown by authors on figure 2O089000200004 (EN-ERR1).Data-point reader uncertainty. O089000200005 (EN-ERR2) Authors' estimation for beam energy O089000200006 uncertainty. O089000200007 (ERR-1) Accuracy of beam current measurements O089000200008 ENDBIB 6 0 O089000200009 COMMON 4 3 O089000200010 ANG EN-ERR1 EN-ERR2 ERR-1 O089000200011 ADEG MEV MEV PER-CENT O089000200012 170. 2.E-03 0.005 0.5 O089000200013 ENDCOMMON 3 0 O089000200014 DATA 3 20 O089000200015 EN DATA ERR-T O089000200016 MEV NO-DIM NO-DIM O089000200017 5.412 91.6 2.2 O089000200018 5.463 100. 2.7 O089000200019 5.513 107. 2.7 O089000200020 5.563 115. 2.7 O089000200021 5.613 121. 2.9 O089000200022 5.613 120. 3. O089000200023 5.638 125. 2.9 O089000200024 5.653 127. 3. O089000200025 5.664 126. 2.7 O089000200026 5.673 129. 3. O089000200027 5.689 130. 3. O089000200028 5.714 131. 3. O089000200029 5.739 129. 3. O089000200030 5.754 128. 2.9 O089000200031 5.764 121. 3. O089000200032 5.774 114. 2.9 O089000200033 5.789 93.7 2. O089000200034 5.814 49.6 0.6 O089000200035 5.864 35.3 0.6 O089000200036 5.964 67.9 0.9 O089000200037 ENDDATA 22 0 O089000200038 ENDSUBENT 37 0 O089000299999 ENDENTRY 2 0 O089099999999