ENTRY C1341 20051018 C076C134100000001 SUBENT C1341001 20051018 C076C134100100001 BIB 11 23 C134100100002 INSTITUTE (1USABNW) C134100100003 REFERENCE (J,SIA,37,374,2005) C134100100004 AUTHOR (W.Jiang,V.Shutthanandan,S.Thevuthasan,C.M.Wang, C134100100005 W.J.Weber) C134100100006 TITLE Nitrogen analysis using energetic ion beams C134100100007 FACILITY (VDGT,1USABNW) 3.0 MV electrostatic tandem accelerator C134100100008 located within the Environmental Molecular Sciences C134100100009 Laboratory at the Pacific Northwest National C134100100010 Laboratory C134100100011 INC-SOURCE Proton and alpha beam, for singly charged particles, C134100100012 the primary energy was stable to +/-1 keV. C134100100013 METHOD (EDE) C134100100014 DETECTOR (SIBAR) A surface barrier detector located 150 degree C134100100015 relative to the incident beam, with an energy C134100100016 resolution of about 15 keV for MeV protons and about C134100100017 20 keV for MeV HeC ions C134100100018 SAMPLE The sample used in this study was an amorphous Si3N4 C134100100019 film on a (111)-oriented Si wafer, which was obtained C134100100020 from Geller Micro-Analytical Laboratory in C134100100021 Massachusetts C134100100022 PART-DET (P) C134100100023 (A) C134100100024 HISTORY (20051018C) DR C134100100025 ENDBIB 23 0 C134100100026 NOCOMMON 0 0 C134100100027 ENDSUBENT 26 0 C134100199999 SUBENT C1341002 20051018 C076C134100200001 BIB 3 3 C134100200002 REACTION (7-N-14(P,EL)7-N-14,,DA,,RTH) C134100200003 ERR-ANALYS (ERR-T) Total uncertainty C134100200004 STATUS Data taken from Table 1 C134100200005 ENDBIB 3 0 C134100200006 COMMON 3 3 C134100200007 ANG EN-ERR ERR-T C134100200008 ADEG KEV PER-CENT C134100200009 150. 1. 4. C134100200010 ENDCOMMON 3 0 C134100200011 DATA 2 64 C134100200012 EN DATA C134100200013 MEV NO-DIM C134100200014 2.480 7.14 C134100200015 2.500 6.89 C134100200016 2.519 6.91 C134100200017 2.539 6.91 C134100200018 2.561 6.45 C134100200019 2.580 6.73 C134100200020 2.600 5.82 C134100200021 2.619 5.53 C134100200022 2.641 5.98 C134100200023 2.661 6.85 C134100200024 2.683 5.98 C134100200025 2.700 5.31 C134100200026 2.719 6.78 C134100200027 2.741 5.90 C134100200028 2.761 5.93 C134100200029 2.781 5.82 C134100200030 2.800 6.49 C134100200031 2.820 6.69 C134100200032 2.842 5.58 C134100200033 2.861 6.25 C134100200034 2.881 7.57 C134100200035 2.903 7.51 C134100200036 2.920 6.96 C134100200037 2.939 6.35 C134100200038 2.961 6.37 C134100200039 2.981 7.12 C134100200040 3.003 6.33 C134100200041 3.022 6.61 C134100200042 3.042 8.07 C134100200043 3.060 8.33 C134100200044 3.065 7.47 C134100200045 3.070 6.11 C134100200046 3.075 5.80 C134100200047 3.081 6.74 C134100200048 3.086 6.63 C134100200049 3.091 6.16 C134100200050 3.096 6.96 C134100200051 3.099 6.62 C134100200052 3.105 7.40 C134100200053 3.110 7.37 C134100200054 3.115 6.82 C134100200055 3.122 6.24 C134100200056 3.125 6.88 C134100200057 3.131 8.31 C134100200058 3.135 7.45 C134100200059 3.139 7.66 C134100200060 3.145 7.19 C134100200061 3.149 6.52 C134100200062 3.154 7.58 C134100200063 3.159 7.29 C134100200064 3.164 7.62 C134100200065 3.169 8.31 C134100200066 3.176 9.78 C134100200067 3.181 12.47 C134100200068 3.186 14.18 C134100200069 3.191 21.35 C134100200070 3.196 24.21 C134100200071 3.201 10.91 C134100200072 3.205 7.16 C134100200073 3.210 5.36 C134100200074 3.215 4.87 C134100200075 3.220 4.81 C134100200076 3.225 2.91 C134100200077 3.230 2.98 C134100200078 ENDDATA 66 0 C134100200079 ENDSUBENT 78 0 C134100299999 SUBENT C1341003 20051018 C076C134100300001 BIB 3 3 C134100300002 REACTION (7-N-14(A,EL)7-N-14,,DA,,RTH) C134100300003 ERR-ANALYS (ERR-T) Total uncertainty C134100300004 STATUS Data taken from Table 1 C134100300005 ENDBIB 3 0 C134100300006 COMMON 3 3 C134100300007 ANG EN-ERR ERR-T C134100300008 ADEG KEV PER-CENT C134100300009 150. 1. 4. C134100300010 ENDCOMMON 3 0 C134100300011 DATA 2 22 C134100300012 EN DATA C134100300013 MEV NO-DIM C134100300014 3.144 2.06 C134100300015 3.173 1.91 C134100300016 3.205 2.02 C134100300017 3.234 1.82 C134100300018 3.266 1.53 C134100300019 3.296 1.72 C134100300020 3.325 1.42 C134100300021 3.354 1.57 C134100300022 3.385 1.31 C134100300023 3.415 1.33 C134100300024 3.445 1.17 C134100300025 3.476 1.15 C134100300026 3.505 1.28 C134100300027 3.535 1.57 C134100300028 3.565 1.96 C134100300029 3.596 1.83 C134100300030 3.625 1.91 C134100300031 3.656 3.10 C134100300032 3.686 4.82 C134100300033 3.715 4.49 C134100300034 3.745 2.22 C134100300035 3.774 1.26 C134100300036 ENDDATA 24 0 C134100300037 ENDSUBENT 36 0 C134100399999 ENDENTRY 3 0 C134199999999